Boron filling of high aspect ratio holes by chemical vapor...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 5

Boron filling of high aspect ratio holes by chemical vapor deposition for solid-state neutron detector applications

Huang, Kuan-Chih, Dahal, Rajendra, LiCausi, Nicolas, Lu, James J.-Q., Danon, Yaron, Bhat, Ishwara B.
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4742856
File:
PDF, 1.61 MB
english, 2012
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