Cu film thermal stability on plasma cleaned polycrystalline...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 5

Cu film thermal stability on plasma cleaned polycrystalline Ru

Liu, Xin, Zhu, Chiyu, Eller, Brianna S., Sun, Tianyin, Jezewski, Christopher J., King, Sean W., Nemanich, Robert J.
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4742906
File:
PDF, 2.59 MB
english, 2012
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