Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
High aspect ratio features in poly(methylglutarimide) using electron beam lithography and solvent developers
Karbasian, Golnaz, Fay, Patrick J., Xing, Huili (Grace), Jena, Debdeep, Orlov, Alexei O., Snider, Gregory L.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4750217
File:
PDF, 2.43 MB
english, 2012