Substrate temperature and electron fluence effects on...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 5

Substrate temperature and electron fluence effects on metallic films created by electron beam induced deposition

Rosenberg, Samantha G., Landheer, Kees, Hagen, Cornelis W., Fairbrother, D. Howard
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4751281
File:
PDF, 1.20 MB
english, 2012
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