Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
Using electron spectroscopy to verify the model of Ga implanted during focused ion beam circuit editing
Niles, David W., Spicer, Teresa, Kee, Ronald W.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4759249
File:
PDF, 1.73 MB
english, 2012