Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
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Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly
Kihara, Naoko, Yamamoto, Ryousuke, Sasao, Norikatsu, Shimada, Takuya, Yuzawa, Akiko, Okino, Takeshi, Ootera, Yasuaki, Kamata, Yoshiyuki, Kikitsu, AkiraVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4763356
File:
PDF, 3.86 MB
english, 2012