Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition
Ashiba, Hiroki, Kometani, Reo, Warisawa, Shin'ichi, Ishihara, SunaoVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4766315
File:
PDF, 1.61 MB
english, 2012