Sensing properties of infrared nanostructured plasmonic...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 6

Sensing properties of infrared nanostructured plasmonic crystals fabricated by electron beam lithography and argon ion milling

Quan, Baogang, Liu, Zhe, Li, Lin, Sun, Weijie, Xu, Xinlong, Xia, Xiaoxiang, Yang, Haifang, Li, Junjie, Gu, Changzhi
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4767274
File:
PDF, 2.42 MB
english, 2012
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