Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
Multiaxis and multibeam technology for high throughput maskless E-beam lithography
Yasuda, Hiroshi, Haraguchi, Takeshi, Yabara, Hidebumi, Takahata, Kouji, Murata, Hidekazu, Rokuta, Eiji, Shimoyama, HiroshiVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4767275
File:
PDF, 1.90 MB
english, 2012