Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
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Selective laser ablation of radiation exposed methyl acetoxy calix(6)arene
Perera, Pradeep N., Schwartzberg, Adam M., de Oteyza, Dimas G., Dhuey, Scott D., Harteneck, Bruce D., Cabrini, Stefano, Olynick, Deirdre L.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4767347
File:
PDF, 1.02 MB
english, 2012