Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 2
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Synthesis of diamond nanotips for enhancing the plasma illumination characteristics of capacitive-type plasma devices
Lou, Shiu-Cheng, Chen, Chulung, Teng, Kuang-Yau, Tang, Chien-Yao, Lin, I-NanVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4769973
File:
PDF, 3.28 MB
english, 2013