Device instability of postannealed TiOx thin-film...

Device instability of postannealed TiOx thin-film transistors under gate bias stresses

Du Ahn, Byung, Ok, Kyung-Chul, Park, Jin-Seong, Chung, Kwun-Bum
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4790572
File:
PDF, 1.48 MB
english, 2013
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