Using the 3D beam propagation method to model the effects...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 3

Using the 3D beam propagation method to model the effects of lithographic roughness on the attenuation of highly multimodal polymer waveguides

Riegel, Nicholas, Middlebrook, Christopher, Kruse, Kevin, Roggemann, Michael
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4802979
File:
PDF, 1.02 MB
english, 2013
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