Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 5
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Flexible substrate and release layer for flexible MEMS devices
Ahmed, Moinuddin, Butler, Donald P.Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4816938
File:
PDF, 897 KB
english, 2013