Impact of electron scattering in extreme ultraviolet...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 6

Impact of electron scattering in extreme ultraviolet reflective multilayer on electron image

Iida, Susumu, Amano, Tsuyoshi, Hirano, Ryoichi, Terasawa, Tsuneo, Watanabe, Hidehiro
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4819300
File:
PDF, 2.38 MB
english, 2013
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