Direct charge measurements to read back stored data in...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 6

Direct charge measurements to read back stored data in nonvolatile memory devices using scanning capacitance microscopy

Dhar, Rudra Sankar, Dixon-Warren, St. John, Campbell, Jeff, Kawaliye, Mohamed Abdi, Green, Mike, Ban, Dayan
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4825200
File:
PDF, 1.82 MB
english, 2013
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