Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 6
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Analysis of water adsorption in plasma-damaged porous low-k dielectric by controlled-atmosphere infrared spectroscopy
Darnon, Maxime, Chevolleau, Thierry, Licitra, Christophe, Rochat, Névine, Zocco, JulienVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4827252
File:
PDF, 1.49 MB
english, 2013