Effect of sputter power on the photobias stability of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 01 Vol. 32; Iss. 1

Effect of sputter power on the photobias stability of zinc-tin-oxide field-effect transistors

Yang, Bong Seob, Oh, Seungha, Jang Kim, Yoon, Jin Han, Sang, Woo Lee, Hong, Jin Kim, Hyuk, Kyung Park, Hui, Kyeong Jeong, Jae, Heo, Jaeyeong, Seong Hwang, Cheol, Joon Kim, Hyeong
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4832329
Date:
January, 2014
File:
PDF, 4.44 MB
english, 2014
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