Microwave-induced nucleation of conducting graphitic...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 01 Vol. 32; Iss. 1

Microwave-induced nucleation of conducting graphitic domains on silicon carbide surfaces

O'Loughlin, Thomas E., Depner, Sean W., Schultz, Brian J., Banerjee, Sarbajit
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4861383
Date:
January, 2014
File:
PDF, 2.87 MB
english, 2014
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