Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 03 Vol. 32; Iss. 2
Theoretical and practical approach to overcome curvature radius limitation of conductive atomic force microscopy tip for imaging of advanced technological node static random access memory devices
Ng, Tsu Hau, James, Sabitha, Dawood, Mohammed Khalid Bin, Tan, Hao, Huang, Yamin, Limin, Pariyarathu Salimon, Tan, Pik Kee, Lam, Jeffrey Chor Keung, Mai, ZhihongVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4863962
Date:
March, 2014
File:
PDF, 2.94 MB
english, 2014