Single-crystalline silver film grown on Si (100) substrate...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 05 Vol. 32; Iss. 3

Single-crystalline silver film grown on Si (100) substrate by using electron-gun evaporation and thermal treatment

Chou, Bo-Tsun, Lin, Sheng-Di, Huang, Bo-Hao, Lu, Tien-Chang
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4874618
Date:
May, 2014
File:
PDF, 1.77 MB
english, 2014
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