Development of gasbag-assisted ultraviolet-based imprinting...

Development of gasbag-assisted ultraviolet-based imprinting process for replication of microstructures onto cylindrical surface

Lin, Cheng-Hui, Hong, Rong-Hong, Li, Tsui-Hua, Yang, Sen-Yeu
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4891920
Date:
September, 2014
File:
PDF, 1.77 MB
english, 2014
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