Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 09 Vol. 32; Iss. 5
Development of gasbag-assisted ultraviolet-based imprinting process for replication of microstructures onto cylindrical surface
Lin, Cheng-Hui, Hong, Rong-Hong, Li, Tsui-Hua, Yang, Sen-YeuVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4891920
Date:
September, 2014
File:
PDF, 1.77 MB
english, 2014