Epitaxial niobium dioxide thin films by reactive-biased...

Epitaxial niobium dioxide thin films by reactive-biased target ion beam deposition

Wang, Yuhan, Comes, Ryan B., Kittiwatanakul, Salinporn, Wolf, Stuart A., Lu, Jiwei
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4906143
Date:
March, 2015
File:
PDF, 1.24 MB
english, 2015
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