Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 03 Vol. 33; Iss. 2
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Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers
Fong, Norman R., Berini, Pierre, Tait, NiallVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4906827
Date:
March, 2015
File:
PDF, 2.09 MB
english, 2015