Electrically stable nanocomposite thin films formed by...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 03 Vol. 33; Iss. 2

Electrically stable nanocomposite thin films formed by oxidation of Pt-ZrB2 nanolaminate templates

Sell, Julia C., Stewart, David M., Bernhardt, George P., Frankel, David J., Lad, Robert J.
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4914313
Date:
March, 2015
File:
PDF, 1.78 MB
english, 2015
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