Focused ion-beam structuring of Si and Si/CoSi[sub 2]...

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Focused ion-beam structuring of Si and Si/CoSi[sub 2] heterostructures using adsorbed hydrogen as a resist

H. Fuhrmann, M. Döbeli, R. Mühle, M. Suter
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Year:
1999
Language:
english
DOI:
10.1116/1.590674
File:
PDF, 633 KB
english, 1999
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