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Ion beam deposition of permanent magnet layers for liftoff processes
H. Hegde, J. Wang, A. J. Devasahayam, V. Kanarov, A. Hayes, R. Yevtukhov, S. Bozeman, P. Anderson, N. Tabat, P. RyanYear:
1999
Language:
english
DOI:
10.1116/1.590890
File:
PDF, 488 KB
english, 1999