Experimental results of the stochastic Coulomb interaction in ion projection lithography
P. W. H. De Jager, G. Derksen, B. Mertens, E. Cekan, G. Lammer, H. Vonach, H. Buschbeck, M. Zeininger, C. Horner, H. Löschner, G. Stengl, A. J. Bleeker, J. Benschop, F. Shi, B. Volland, P. Hudek, H.Year:
1999
Language:
english
DOI:
10.1116/1.590961
File:
PDF, 687 KB
english, 1999