NANOJET: Nanostructuring via a downstream plasmajet

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NANOJET: Nanostructuring via a downstream plasmajet

J. Voigt, B. Reinker, I. W. Rangelow, G. Mariotto, I. Shvets, P. Guethner, H. Löschner
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Year:
1999
Language:
english
DOI:
10.1116/1.591060
File:
PDF, 756 KB
english, 1999
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