Production of shallow ion-implanted layers using rapid...

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Production of shallow ion-implanted layers using rapid electron-beam annealing under the condition of transient-enhanced outdiffusion

V. A. Kagadei, D. I. Proskurovsky
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Year:
2000
Language:
english
DOI:
10.1116/1.591210
File:
PDF, 424 KB
english, 2000
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