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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 20 January 2007)] Laser-based Micro- and Nanopackaging and Assembly - Potentials of fiber laser technology in microfabrication
Franke, Volker, Klotzbach, Udo, Panzner, Michael, Püschel, Roger, Pfleging, Wilhelm, Lu, Yongfeng, Washio, Kunihiko, Bachmann, Friedrich G., Hoving, WillemVolume:
6459
Year:
2007
Language:
english
DOI:
10.1117/12.700486
File:
PDF, 636 KB
english, 2007