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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV - Photolithographic fabrication of slot waveguides
Spott, Alexander, Schoenfeld, Winston V., Wang, Jian Jim, Ding, Ran, Baehr-Jones, Tom, Loncar, Marko, Suleski, Thomas J., Kim, Woo-Joong, Xiong, Xugang, Bojko, Richard, Fedeli, Jean-Marc, Fournier, MaVolume:
7927
Year:
2011
Language:
english
DOI:
10.1117/12.876093
File:
PDF, 1.67 MB
english, 2011