[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Seventh International Workshop on Stress-Induced Phenomena in Metallization - Austin, Texas (USA) (14-16 June 2004)] AIP Conference Proceedings - Effects of Passivation Layer on Stress Relaxation and Mass Transport in Electroplated Cu Films
Gan, DongwenVolume:
741
Year:
2004
Language:
english
DOI:
10.1063/1.1845857
File:
PDF, 503 KB
english, 2004