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[AIP CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005 - Richardson, Texas (USA) (15-18 March 2005)] AIP Conference Proceedings - Limits of Optical and X-ray Metrology Applied to Thin Gate Dielectrics
Zollner, StefanVolume:
788
Year:
2005
Language:
english
DOI:
10.1063/1.2062957
File:
PDF, 292 KB
english, 2005