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[AIP SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation - Daegu (Korea) (28 May-2 June 2006)] AIP Conference Proceedings - Wavefront Metrology for EUV Projection Optics by Soft X-ray interferometry in the NewSUBARU
Niibe, Masahito, Sugisaki, Katsumi, Okada, Masashi, Kato, Seima, Ouchi, Chidane, Hasegawa, TakayukiVolume:
879
Year:
2007
Language:
english
DOI:
10.1063/1.2436354
File:
PDF, 422 KB
english, 2007