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[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Protocol Optimisation For Work-Function Measurements Of Metal Gates Using Kelvin Force Microscopy
Mariolle, D., Kaja, K., Bertin, F., Martinez, E., Martin, F., Gassilloud, R., Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799428
File:
PDF, 1.03 MB
english, 2007