[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Application of Micro-thermal Analysis for Metal, Oxide, and Non-oxide Thin Film Materials
Carlie, Nathan, Massera, Jonathan, Petit, Laeticia, Richardson, Kathleen, Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251224
File:
PDF, 1.43 MB
english, 2009