AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - Plasma Immersion Ion Implantation Applied To N[sup +]P Junction Realisation In 4H-SiC
Ottaviani, Laurent, Biondo, Stéphane, Daineche, Rachid, Palais, Olivier, Milesi, Frédéric, Duchaine, Julian, Torregrosa, Frank, Matsuo, Jiro, Kase, Masataka, Aoki, Takaaki, Seki, ToshioYear:
2011
Language:
english
DOI:
10.1063/1.3548362
File:
PDF, 630 KB
english, 2011