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Damp and dry heat degradation of thermal oxide passivation of p+ silicon
Thomson, Andrew, Gardner, Matthew, McIntosh, Keith, Shalav, Avi, Bullock, JamesVolume:
115
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4869057
Date:
March, 2014
File:
PDF, 919 KB
english, 2014