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High-fidelity rapid prototyping of 300 mm fabs through discrete event system modeling
Jonghun Park, Spyros A. Reveliotis, Douglas A. Bodner, Chen Zhou, Jennfong Wu, Leon F. McGinnisVolume:
45
Year:
2001
Language:
english
Pages:
20
DOI:
10.1016/s0166-3615(01)00082-3
File:
PDF, 350 KB
english, 2001