Multitarget Sputtering of Piezoelectric Mixed Oxide Thin...

Solid State Phenomena 2015 / 6 Vol. 230

Multitarget Sputtering of Piezoelectric Mixed Oxide Thin Films onto Flexible Substrates

Kleiner, Anja, Suchaneck, Gunnar, Dejneka, Alexandr, Jastrabik, Lubomir, Lavrentiev, Vasily, Kiselev, Dmitry A., Gerlach, Gerald
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Volume:
230
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.230.3
Date:
June, 2015
File:
PDF, 369 KB
english, 2015
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