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Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics
Serra, E., Bonaldi, M., Borrielli, A., Marin, F., Marconi, L., Marino, F., Pandraud, G., Pontin, A., Prodi, G.A., Sarro, P.M.Volume:
145
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.036
Date:
September, 2015
File:
PDF, 1.09 MB
english, 2015