![](/img/cover-not-exists.png)
Engineered Coalescence by Annealing of 3D Ge Microstructures into High-Quality Suspended Layers on Si
Salvalaglio, Marco, Bergamaschini, Roberto, Isa, Fabio, Scaccabarozzi, Andrea, Isella, Giovanni, Backofen, Rainer, Voigt, Axel, Montalenti, Francesco, Capellini, Giovanni, Schroeder, Thomas, Von KanelLanguage:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.5b05054
Date:
August, 2015
File:
PDF, 24.30 MB
english, 2015