Engineered Coalescence by Annealing of 3D Ge...

ACS Applied Materials & Interfaces 2015 / 08

Engineered Coalescence by Annealing of 3D Ge Microstructures into High-Quality Suspended Layers on Si

Salvalaglio, Marco, Bergamaschini, Roberto, Isa, Fabio, Scaccabarozzi, Andrea, Isella, Giovanni, Backofen, Rainer, Voigt, Axel, Montalenti, Francesco, Capellini, Giovanni, Schroeder, Thomas, Von Kanel
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.5b05054
Date:
August, 2015
File:
PDF, 24.30 MB
english, 2015
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