[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Optical exposure systems for three-dimensional fabrication of microprobe
Esashi, M., Minami, K., Shoji, S.Year:
1991
Language:
english
DOI:
10.1109/MEMSYS.1991.114766
File:
PDF, 394 KB
english, 1991