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[IEEE 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) - Singapore, Singapore (2015.5.24-2015.5.27)] 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM) - LiTaO3/silicon composite wafers for the fabrication of low loss low TCF high coupling resonators for filter applications
Courjon, E., Ballandras, S., Daniau, W., Baron, T., Moulet, J.B., Signamarcheix, T.Year:
2015
Language:
english
DOI:
10.1109/isaf.2015.7172709
File:
PDF, 803 KB
english, 2015