Selective reactive ion etching of GaAs/AlAs in BCl[sub...

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Selective reactive ion etching of GaAs/AlAs in BCl[sub 3]/SF[sub 6] for gate recess

Y. Lee, K. Upadhyaya, K. J. Nordheden, M. Kao
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Year:
2000
Language:
english
DOI:
10.1116/1.1288134
File:
PDF, 427 KB
english, 2000
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