Selective chemical vapor deposition of copper on AZ...

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Selective chemical vapor deposition of copper on AZ 5214™-patterned silicon substrates

D. Davazoglou, S. Vidal, A. Gleizes
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Year:
2001
Language:
english
DOI:
10.1116/1.1362680
File:
PDF, 719 KB
english, 2001
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