Mechanical system construction for the EX-11 electron beam...

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Mechanical system construction for the EX-11 electron beam mask writer: A solution for 100 nm wafer lithography

K. Akeno, M. Ogasawara, T. Tojo
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Year:
2002
Language:
english
DOI:
10.1116/1.1446452
File:
PDF, 593 KB
english, 2002
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