Fabrication of two-dimensional InP-based photonic crystals by chlorine based chemically assisted ion beam etching
M. Mulot, S. Anand, R. Ferrini, B. Wild, R. Houdré, J. Moosburger, A. ForchelYear:
2004
Language:
english
DOI:
10.1116/1.1688353
File:
PDF, 537 KB
english, 2004