Ion beam sputtering of Ta[sub 2]O[sub 5] films on...

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Ion beam sputtering of Ta[sub 2]O[sub 5] films on thermoplast substrates as waveguides for biosensors

W. Kulisch, D. Gilliland, G. Ceccone, L. Sirghi, H. Rauscher, P. N. Gibson, M. Zürn, F. Bretagnol, F. Rossi
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Year:
2009
Language:
english
DOI:
10.1116/1.3137965
File:
PDF, 2.00 MB
english, 2009
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