Ion beam sputtering of Ta[sub 2]O[sub 5] films on thermoplast substrates as waveguides for biosensors
W. Kulisch, D. Gilliland, G. Ceccone, L. Sirghi, H. Rauscher, P. N. Gibson, M. Zürn, F. Bretagnol, F. RossiYear:
2009
Language:
english
DOI:
10.1116/1.3137965
File:
PDF, 2.00 MB
english, 2009